Cleveland State University

Department of Electrical and Computer Engineering


EEC 693 Dynamics and Control of MEMS

Spring 2009



Instructor:     Dr. Lili Dong, Assistant Professor of Electrical Engineering, Office: Room 334 Stillwell Hall, phone: 216-687-5312, Email:


Class Time:        TTH, 4:00pm-5:50pm


Office Hours:    MW, 2:00pm-4:00pm


Classroom:        TBA


Content:            This course provides a comprehensive overview of MEMS technique and MEMS control. Topics include MEMS fabrication processes, sensors and actuators used in MEMS, Dynamic modeling of MEMS, control, signal processing, and electronics for MEMS, and case studies of MEMS devices.


Objectives:       After taking this course, students should be able to

·        Understand MEMS fabrication techniques.

·        Develop dynamics models for MEMS devices.

·        Discuss the typical MEMS actuators and sensors

·        Design control systems for MEMS devices


Textbook:          Microsystem Design, by Stephen D. Senturia, Kluwer Academic Press, 2001.


References:      Foundations of MEMS, by Chang Liu, Prentice Hall, 2006.

                            An Introduction to Microelectromechanical Systems Engineering, by Nadim Maluf, Artech House Publishers, 2000.

                          MEMS and Microsystems Design and Manufacture, by Tai-Ran Hsu, McGraw Hill, 2002.


Prerequisite:    EEC510: Linear systems.


Grading:           Homework                             5%

     Project                                   30%

                             In-class quiz                          20%

                             Attendances of Invited Talks   5%

                             Midterm Exam                      20%

                             Final Exam                            20%


Grading Scale:

                             A………………………….. .93-100

                             A minus…………………….. 87-92

                             B plus………………………..80-86

                             B………………………….. .. 75-79

                           B minus…………………...... 70-74

                             C …………………….. …..... 60-69

                              F……..……………………… <60


Homework:      Homework is a major learning tool in this course. Identical homework will receive a grade of ZERO. Homework turned in after the due date will result in a deduction of 5 points per day the assignment is late.  The pages of homework should be stapled and the problems should be in order.  Students must print and sign their names on the first page of their homework.


Projects:            Students are required to finish three projects before the end of this semester. For the first two projects, students need to use a CAD tool named MEMSpro to do fabrication designs of MEMS devices. For the third project, students are required to design a control system for a MEMS sensor or actuator and present their control designs using Microsoft PowerPoint. Each presentation will last no more than 10 minutes. The projects must be submitted to the instructor on the date specified in the project assignments. NO LATE PROJECTS will be accepted.


Tests:                    There are four in-class quizzes, one two-hour midterm exam, and one two-                              hour final exam.  Quizzes and Exams will be closed book and closed notes with time limits strictly enforced. Make-up tests are a VERY rare occurrence and will only be permitted with prior approval. As all students are expected to be present for all class periods, make-up exams may be scheduled only for substantial and unavoidable reasons. Student must show up at the scheduled time of make-up exam. Otherwise, he/she will receive a ZERO for the test.  Exams are scheduled on course outline.


Attendance Policy:      

                            Regular attendance is required and expected. If a student must be absent due to university business or illness, the student is obliged to contact the instructor PRIOR to the absence or tardiness. The instructor reserves the right to limit the quality/quantity of out-of-class assistance to students with excessive absences. More than two unexcused absences during the semester will result in a lowered letter grade. Each additional absence beyond three will result in a further lowering of the letter grade. If a student misses one third of classes, he/she will automatically FAIL this course.


                          Students with excused absences are excused from class attendance but are not excused from work assigned or expected as a part of that class period. Students are required to develop a plan for the make-up of all work missed and must complete this work within a time frame mutually agreed upon with the instructor.


Academic Honesty Policy:

                              Cheating, plagiarism (submitting another person’s material as one’s own), or doing work for another person which will receive academic credit are all impermissible. This includes the use of unauthorized books, notebooks, or other sources in order to secure or give help during an examination, the unauthorized copying of examinations, assignments, reports, or term papers, or the presentation of unacknowledged material as if it were the student’s own work. Academic plagiarism and cheating will result in ZERO grades of the exams or assignments.


Classroom Policy:


My goal is to create a cooperative, tolerant classroom that involves all students in different learning activities. Classroom behavior will be governed by four policies that will help produce a tolerant, cooperative classroom. The four policies are:

·     Students will NOT be allowed to leave this class unless it is an emergency or sickness.

·     Come to class ON TIME or early.

·     Everyone, including the instructor, will be treated with respect. Putdowns and purposely hurtful comments or actions will not be tolerated. No one will be allowed to disrupt the learning process of anyone else. NO chatting and discussing in classes unless it is allowed by the instructor.



Others:            All major class materials will be uploaded to Blackboard System. All important notices from instructor will be announced in Blackboard system as well.



Tentative Course Outline:


Date    Lecture     Read Sections          Topics

1-20       1            1.1-1.4, 2.2, 2.3        Introduction to MEMS

1-22       2             3.1, 3.2                    Silicon as a material for MEMS

1-27       3             3.3.1-3.3.4               Pattern Transfer: Photolithography and wet etching

1-29       4             3.3.5-3.3.6,              Pattern Transfer: Dry etching

                              4.1, 4.2                     MEMS fabrication process I

2-3         5             4.2                            MEMS fabrication process II

                             4.3-4.4                      Process examples

2-       6             5.1-5.4                      Lumped models: equivalent circuits

2-10       7             5.5, 6.1- 6.2              Capacitive sensors

2-12       8             6.3-6.4                      Electrostatic actuators

2-17       9             7.1-7.2                      Linear dynamic systems

2-19      10            7.3                            Nonlinear dynamics

2-24      11            8.1-8.2                      Linear elasticity

2-26      12            8.3-8.5                      Thin film stress, large deformation

2-26      13            9.1-9.2                      Axially loaded beams

3-      14            9.3, 9.6, 9.8              Beam bending and residual stress

3-5         Mid-term Exam (on lectures 1-14 and homework)

3-10                                                        Invited talk about micromachining technology

3-12       15            14.1-14.6                  Semiconductor physics, diodes, and transistors 

From 3-15 through 3-22                         Spring Break

3-24      16           14.7-14.12                 Amplifiers and charge-measuring circuits   

3-26      17           15.1-15.4                   Feedback systems

3-31      18           15.5                           Oscillators

                                                               Uncertainty and robustness

                                                               Model reference adaptive control

4-2        19           16.4-16.5                   Random noise in MEMS

4-7        20           18.1-18.2                   Piezoresistive pressure sensor

4-9        21           18.3                            Motorola pressure sensor

4-14      22           19.1-19.3                   Capacitive accelerometer I

4-16      23           19.4-19.5                   Capacitive accelerometer II

4-21      24           21.1-21.4                   Piozoelectric actuators and sensors

4-23      25           handout                      Control of a MEMS gyroscope (I)

4-28      26           handout                      Control of a MEMS gyroscope (II)       

4-30      27                                              Invited Talk                                

5-5        28                                              Student Presentations

5-7        29                                              Final review

5-12      Final Exam (on lectures 1-27 and homework)                                                          


Note: The course outline is subject to change during the semester.